An all-metal UHV-system combines time-of-flight secondary ion mass spectrometry (tof-SIMS) and X-ray photoelectron spectroscopy (XPS) for surface analysis of solid materials. Sample positioning beneath SIMS/XPS probes is shown in the bottom picture.
A rotary distribution chamber allows for sample transfer between the analysis chamber and a preparation chamber (cleaning by sputtering, heating-cooling, low-pressure adsorption/reaction) or a high-pressure catalytic flow reactor (operated up to 50 bar). The conceptual design of the set-up is such that several samples can be handled simultaneously.
An STM system is attached to the rotary distribution chamber. The surface structure of various materials can be determined by STM at various temperatures with a resolution down to the atomic scale.
SIMS - XPS - STM rotary distribution chamber
SIMS - XPS analytical chamber